基于印压断裂力学理论分析了磷酸二氢钾晶体表面缺陷面积与中位裂纹深度的关系.在刀具参量和主轴转数一定的情况下, 采用不同切削深度和进给速率对磷酸二氢钾晶体进行单点金刚石飞切加工实验, 并计算晶体表面单位面积缺陷的占比系数.实验结果表明, 晶体表面缺陷深度与面积占比系数成正相关, 与理论分析结果相符, 进而提出了利用计算晶体表面缺陷占比系数估测缺陷深度的方法.最后基于该方法得到高效率切削步骤, 并加工获得了表面粗糙度算术平均值优于5 nm的超光滑晶体表面.

Based on the vibration theory and the matrix optics theory, the principle of the optical image method to test the beam positioning stability is derived. The test method of beam positioning stability is designed, and the experimental results show that the optical image method can accurately analyze the range of the beam positioning stability error, also can analyze the value and influence degree of vibration frequency of the error, and combined with the accelerometer by the electron test method, the source of the error can be detected in the optical system. The optical-electro test method is reliable, simple and convenient, and has good engineering application value, especially for large optical system.

从振动的基本理论出发,应用矩阵光学理论,推导了光学图像法测试光束指向稳定性的原理。设计了光电法测试光束指向稳定性的测试应用,并搭建了实验光路,结果表明:光学图像法可以准确分析光束指向稳定性误差的大小、产生的误差的振动频率及其影响程度,并结合加速度计的电学法测试,可以探测光路中引起光束指向误差的来源。光电法测试结果正确可靠、简单方便,具有较好的工程应用价值,特别适合大型光学系统的光束指向稳定性测试。